Lithographic apparatus
WebPURPOSE: A lithographic apparatus is provided to decrease the sensitivity to the effects of collision in a horizontal plane and to reduce the damage caused by such a collision. … Web9. A lithographic projection apparatus arranged to project a pattern from a patterning device onto a substrate, the apparatus comprising: a substrate table configured to support a substrate and a sensor; a liquid supply system configured to provide liquid in a space between a projection system and a surface of the substrate table; and a controller …
Lithographic apparatus
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Web6 apr. 2001 · On-the-Fly leveling in a lithographic apparatus is conducted using a setpoint derived by filtering the output of the combination of the output of a level sensor and …
Web29 nov. 2012 · The lithographic apparatus component of claim 2, wherein the lithographic apparatus component is a projection system wall, a substrate table, a mirror, a heat sink … Web摘要： To provide an alternative method for vibration reduction of a lithographic apparatus.A lithographic apparatus has a shield that protects a functional subsystem …
Web9 jul. 2009 · Abstract. A lithographic apparatus configured to project a patterned beam of radiation onto a target portion of a substrate is disclosed. The apparatus includes … WebA chamber for a projection system of a lithographic apparatus is described, the chamber comprising:- an opening configured to enable, during use, a patterned radiation beam to be projected onto a substrate that is arranged outside the chamber;- a conduit having an …
WebTo provide an improved conduit system, the lithographic apparatus further includes a control system which is used to control the movement of the object based on …
Web1. A lithographic apparatus arranged to project a pattern from a patterning device onto a substrate through a liquid confined in a space adjacent the substrate and along a beam path in the space, the apparatus comprising: a liquid confinement structure configured to at least partly confine the liquid in the space, the liquid confinement structure having, a liquid … nottinghamshire opccWebIn a lithographic projection apparatus, a structure surrounds a space between the projection system and a substrate table of the lithographic projection apparatus. A gas … nottinghamshire on the mapWeb9. A lithographic projection apparatus arranged to project a pattern from a patterning device onto a substrate, the apparatus comprising: a substrate table configured to … nottinghamshire os mapWebFind many great new & used options and get the best deals for Vintage Marx Pressed Metal Litho Dick Tracy Squad Friction Police Car in box at the best online prices at eBay! Free shipping for many products! Skip to main content. Shop by ... Trucks & Vans, Marx Collectors & Hobbyists Friction Toys, Marx Pressed Steel Vintage Manufacture Diecast ... nottinghamshire parent carer forumWebTypical wavelengths currently in use are 365 nm (i-line), 248 nm, 193 nm and 13.5 nm. A lithographic apparatus, which uses extreme ultraviolet (EUV) radiation, having a wavelength within the range 4-20 nm, for example 6.7 nm or 13.5 nm, may be used to form smaller features on a substrate than a lithographic apparatus which uses, ... how to show money in excelWebLithographic projection apparatus专利检索，Lithographic projection apparatus属于·渗析专利检索，找专利汇即可免费查询专利，·渗析专利汇是一家知识产权数据服务商，提供专利分析，专利查询，专利检索等数据服务功能。 how to show month and year in excelWeb18 dec. 2008 · Patent application title: Lithographic apparatus and device manufacturing method Inventors: Hendrik Antony Johannes Neerhof (Eindhoven, NL) Cornelis Maria … nottinghamshire open gardens